Piezo MEMS – design, fabrication and characterisation
2–5pm Sunday 13 June 2010, Norway
(prior to Electroceramics XII)

The Piezo Institute is organising an industrial training course on piezoelectric micro electromechanical systems (piezo MEMS) in concurrence with the Electroceramics XII conference.

Piezo MEMS have applications across a range of sectors including security, health, and the environment. Fully realising the benefits requires a sound understanding of the challenges and solutions to design, manufacture and testing of these devices. This course will provide you with an insight in solutions from some of Europe’s top researchers.

Prof Markys Cain (NPL, UK) and Dr Robert Dorey (Cranfield University, UK), both leaders in the field, will discuss:

• Introduction to piezo MEMS design
• Fabrication – processing & tools
• Characterisation – methods & metrology
• Applications & future research

This training course is at an intermediate to advanced level, suitable for late term PhDs and PDRAs.

The course is located at the same venue as Electroceramics XII, and finishes in time for delegates to attend the Electroceramics XII welcome reception.

Costs

• €140 per person
• Delegates are responsible for arranging and paying their transport and accommodation